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zhaoshike 2026-8-3

10 Highly selective radical etching of Si3N4using NF3/O2/N2/H2mixtures on 3D multilayer stack transistor integration

IEEE
1已完成

zhaoshike 2026-8-3

10 Development of Wafer-Type Plasma Monitoring Sensor with Automated Robot Arm Transfer Capability for Two-Dimensional In Situ Processing Plasma Diagnosis

MDPI
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zhaoshike 2026-8-3

10 Mitigation of Particle-Induced Defects in HDP-FSG Deposition

IEEE
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zhaoshike 2026-8-3

10 Sustainable plasma processes for the cleaning of etching reactors

SPIE
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zhaoshike 2026-8-3

20 Through-silicon via etch uniformity enhancement and aspect-ratio influence on etch rate and profile

其他期刊
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zhaoshike 2026-8-3

10 Elimination of Bond Pad Etch Induced Wafer Arcing via Reducing ESC Chuck Surface Charges

IEEE
1已完成

天想月 2026-8-3

20 Enhancement and balance of 1,4-butanediamine biosynthesis in Escherichia coli based on modular metabolic engineering

Elsevier/Sciencedirect
1已完成

MKbhz 2026-8-3

10 Reappraising Dichloromethane: Uncovering a Hidden Coupling Reagent for Activating Carboxylic Acids in Direct Amide Synthesis

ACS
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zhaoshike 2026-8-3

10 Formation of a Contact Pad in the Ceramic Structure of an Electrostatic Chuck

IEEE
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zhaoshike 2026-8-3

10 AI-Powered Electrostatic Chuck Arcing Prediction Model in Dry Etch Chambers

IEEE
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3011008 2026-8-3

20 Processing of the Heat Resistant Bearing Steel M50NiL by Selective Laser Melting

其他期刊
1已完成

天想月 2026-8-3

30 Hydrazine Hydrate for Room-Temperature Cyclodipeptide Synthesis

Thieme
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zhaoshike 2026-8-3

10 Copper Residue Removal from Electrostatic Chuck to Mitigate Helium Leak Faults Using Enhanced In-Situ Chamber Clean : EO: Equipment Optimization

IEEE
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zhaoshike 2026-8-3

10 Improved conformal behavior in beam-structure electrostatic chucks by spring-based rotatable pad-shaped electrode tips

IOP
1已完成

zhaoshike 2026-8-3

20 Enhanced attractive force via torsion spring as rotatable tip structure in beam-structure electrostatic chucks

Elsevier/Sciencedirect
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zhaoshike 2026-8-3

20 Polymeric wafer contact surface integrity and uniformity of electrostatic chuck: Characterization and potential impact on ion implant process

其他期刊
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zhaoshike 2026-8-3

10 Enhanced temperature uniformity of electrostatic chuck: ceramic surface contact ratio and backside gas pressure

IOP
1已完成

zhaoshike 2026-8-3

20 Optimizing electrostatic chuck performance through ZrO2/Al2O3 ratio and doping components (SiO2 and Y2O3)

Elsevier/Sciencedirect
1已完成

zhaoshike 2026-8-3

20 Study of chucking force distribution according to substrate pattern and deformation characteristics of electrostatic chuck for deposition

Elsevier/Sciencedirect
1已完成

Wayaya 2026-8-3

20 Enhancement of flexural strength in ZTA ceramic substrates through synergy of grain refinement and densification

Elsevier/Sciencedirect

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