Design and Characterization of Micro-Oven-Controlled MEMS Resonators With Two-Dimensional Honeycomb-Lattice Phononic Crystals for Anchor Loss Suppression

发表于 2026-7-10 10:47:20

期刊：Journal of Microelectromechanical Systems

文献作者：Gongqi Meng; Yuhao Xiao; Sheng Liu; Guoqiang Wu

出版日期：2026-4-

DOI号：10.1109/jmems.2026.3652347

下载链接：https://ieeexplore.ieee.org/stampPDF/getPDF.jsp?arnumber=11361288

文献链接：https://doi.org/10.1109/jmems.2026.3652347

当前文献来源于 Institute of Electrical and Electronics Engineers (IEEE)。

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[IEEE] Design and Characterization of Micro-Oven-Controlled MEMS Resonators With Two-Dimensional Honeycomb-Lattice Phononic Crystals for Anchor Loss Suppression

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