High crystal quality and low residual stress composite piezoelectric films prepared by a two-step method

发表于 2026-7-13 21:21:13

期刊：Journal of Micromechanics and Microengineering

文献作者：Binghui Lin; Yao Cai; Yaxin Wang; Chao Gao; Gai Wu; Yan Liu; Wenjuan Liu; Daw Don Cheam; Chengliang Sun

出版日期：2023-10-1

DOI号：10.1088/1361-6439/acf2a8

下载链接：https://iopscience.iop.org/article/10.1088/1361-6439/acf2a8

文献链接：https://doi.org/10.1088/1361-6439/acf2a8

当前文献来源于 IOP Publishing。

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[IOP] High crystal quality and low residual stress composite piezoelectric films prepared by a two-step method

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