Nitrogen Doping of Epitaxial SiC: Experimental Evidence of the Re-Incorporation of Etched Nitrogen during Growth

发表于 2026-7-20 16:22:15

期刊：Materials Science Forum

文献作者：Jérome Mezière; Pierre Ferret; Elisabeth Blanquet; Michel Pons; Lea Di Cioccio; Thierry Billon

出版日期：--

DOI号：10.4028/www.scientific.net/msf.457-460.731

下载链接：https://www.scientific.net/MSF.457-460.731.pdf

文献链接：https://doi.org/10.4028/www.scientific.net/msf.457-460.731

当前文献来源于 Trans Tech Publications, Ltd.。

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