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[IEEE] High-Performance 4H-SiC EUV Photodiode With Lateral p-n Junction Fabricated by Selective-Area Ion Implantation

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期刊：IEEE Electron Device Letters

文献作者：Yifu Wang; Zhiyuan Wang; Weizong Xu; Feng Zhou; Dong Zhou; Fangfang Ren; Dunjun Chen; Rong Zhang; Youdou Zheng; Hai Lu

出版日期：2024-5-

DOI号：10.1109/led.2024.3381129

下载链接：https://ieeexplore.ieee.org/stampPDF/getPDF.jsp?arnumber=10478027

文献链接：https://doi.org/10.1109/led.2024.3381129

当前文献来源于 Institute of Electrical and Electronics Engineers (IEEE)。

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[IEEE] High-Performance 4H-SiC EUV Photodiode With Lateral p-n Junction Fabricated by Selective-Area Ion Implantation