[IEEE] Formation of a Contact Pad in the Ceramic Structure of an Electrostatic Chuck

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zhaoshike 发表于 2026-8-3 08:47:40 | 显示全部楼层 |阅读模式
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期刊:2026 ElCon Conference of Young Researchers in Micro and Nanoelectronics, Electrical Engineering Materials, Plasmas and Fields, Photonics and Electro-Optics (ElCon-MN)

文献作者:Viktor S. Traktirshchikov; Viktor V. Kalugin; Maksim E. Shiryaev; Ivan A. Korotkevich

出版日期:2026-2-3

DOI号:10.1109/elcon-mn69838.2026.11417105

下载链接:https://ieeexplore.ieee.org/stampPDF/getPDF.jsp?arnumber=11417105

文献链接:https://doi.org/10.1109/elcon-mn69838.2026.11417105

当前文献来源于 IEEE


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