Investigation of support transducer enabled higher-order radial bulk mode MEMS resonator and low phase noise oscillator

发表于 2026-9-7 17:08:28

期刊：Journal of Micromechanics and Microengineering

文献作者：Kongbrailatpam Sandeep Sharma; Hsin-Tung Jen; Sheng-Shian Li; Gayathri Pillai

出版日期：2022-8-1

DOI号：10.1088/1361-6439/ac7bd1

下载链接：https://iopscience.iop.org/article/10.1088/1361-6439/ac7bd1

文献链接：https://doi.org/10.1088/1361-6439/ac7bd1

当前文献来源于 IOP Publishing。

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[IOP] Investigation of support transducer enabled higher-order radial bulk mode MEMS resonator and low phase noise oscillator

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