A high-efficiency polishing strategy for polycrystalline diamond: synergistic effects of plasma pretreatment and short-duration chemical mechanical polishing

发表于 2026-9-9 16:28:26

期刊：Diamond and Related Materials

文献作者：Jinxin Zou; Zhu Chang; Wangzhe Leng; Liping Zheng; Peng Liu; Jianjun Zhang; Liangxian Chen; Jinlong Liu; Chengming Li; Junjun Wei

出版日期：2026-8-

DOI号：10.1016/j.diamond.2026.113902

下载链接：https://www.sciencedirect.com/sc ... 925963526006138/pdf

文献链接：https://doi.org/10.1016/j.diamond.2026.113902

当前文献来源于 Elsevier BV。

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发表于 2026-9-9 16:28:27

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[Elsevier/Sciencedirect] A high-efficiency polishing strategy for polycrystalline diamond: synergistic effects of plasma pretreatment and short-duration chemical mechanical polishing

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