当前位置: »论坛 › 科研专区 › 文献互助› Moiré fringe-based offset control method for overla ...

[SPIE] Moiré fringe-based offset control method for overlay grating alignment using substrate grating and experimental verification

求助已关闭

君子尚拙 发表于 2026-9-20 15:54:32 | 显示全部楼层 |阅读模式

悬赏10积分

期刊：Fourth International Conference on Optics and Machine Vision (ICOMV 2025)

文献作者：Shuonan Shan; Zhipeng Zeng; Xiaohao Wang; Xinghui Li

出版日期：2025-8-15

DOI号：10.1117/12.3071860

文献链接：https://doi.org/10.1117/12.3071860

当前文献来源于 SPIE。

备注信息：

使用道具捐赠获取积分应助有误反馈

全部回复0 显示全部楼层

发表回复

君子尚拙 Lv.4

VIP会员

发布
回复
积分
645

同分类求助

10 Palladium/hafnium-coated pi-FBGs: a path to wavelength-encoded, zero-point-referenced, linearized, and temperature-decoupled hydrogen sensing

[SPIE] Moiré fringe-based offset control method for overlay grating alignment using substrate grating and experimental verification

发表回复

同分类求助

最新回复

站点公告

今日热心研友

（热心研友QQ群）

[SPIE] Moiré fringe-based offset control method for overlay grating alignment using substrate grating and experimental verification 一键复制

发表回复

同分类求助

最新回复

站点公告

今日热心研友

（热心研友QQ群）

[SPIE] Moiré fringe-based offset control method for overlay grating alignment using substrate grating and experimental verification