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[SPIE] Deep-learning-driven automation of inner and outer object segmentation in SEM/TEM imaging for semiconductor metrology

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Memory 发表于 2026-9-20 23:53:07 | 显示全部楼层 |阅读模式

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期刊：Journal of Micro/Nanopatterning, Materials, and Metrology

文献作者：Isaac Wilfried Sanou; Julien Baderot; Vincent Barra; Ali Hallal; Léo Mazauric; Johann Foucher

出版日期：2025-10-9

DOI号：10.1117/1.jmm.24.4.041406

文献链接：https://doi.org/10.1117/1.jmm.24.4.041406

当前文献来源于 SPIE-Intl Soc Optical Eng。

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[SPIE] Deep-learning-driven automation of inner and outer object segmentation in SEM/TEM imaging for semiconductor metrology